danДоклады Национальной академии наук БеларусиDoklady of the National Academy of Sciences of Belarus1561-83232524-2431The Republican Unitary Enterprise Publishing House "Belaruskaya Navuka"10.29235/1561-8323-2023-67-2-101-110dan-1117Research ArticleФИЗИКАPHYSICSСтруктурно-фазовые состояния и микромеханические свойства наноструктурированных покрытий TiAlCuNStructural-phase states and micromechanical properties of nanostructured TiAlCuN coatingsКонстантиновC. В.KonstantinovS. V.

Константинов Станислав Валерьевич – канд. физ.-мат. наук, доцент, ст. науч. сотрудник

ул. Курчатова, 7, 220045, Минск

Konstantinov Stanislav V. – Ph. D. (Physics and Mathematics), Associate Professor, Senior Researcher

7, Kurchatov Str., 220045, Minsk

svkonstantinov@bsu.byКомаровФ. Ф.KomarovF. F.

Комаров Фадей Фадеевич – академик, д-р физ.-мат.наук, профессор, заведующий лабораторией

ул. Курчатова, 7, 220045, Минск

Komarov Fadei F. – Academician, D. Sc. (Physics andMathematics), Professor, Head of the Laboratory

7, Kurchatov Str., 220045, Minsk

komarovF@bsu.byЧижовИ. В.ChizhovI. V.

Чижов Игорь Викторович – аспирант

пр. Независимости, 4, 220030, Минск

Chizhov Igor V. – Postgraduate Student.

4, Nezavisimosti Ave., 220030, Minsk

igorchizhovwork@gmail.comЗайковВ. А.ZaikovV. A.

Зайков Валерий Александрович – ст. преподаватель

пр. Независимости, 4, 220030, Минск

Zaikov Valery A. – Senior Lecturer

4, Nezavisimosti Ave., 220030, Minsk

zaikov@bsu.byИнститут прикладных физических проблем имени А. Н. Севченко Белорусского государственного университетаA. N. Sevchenko Institute of Applied Physical Problems of Belarusian State UniversityБелорусский государственный университетBelarusian State University202307052023672101110Copyright © Константинов C.В., Комаров Ф.Ф., Чижов И.В., Зайков В.А., 20232023Константинов C.В., Комаров Ф.Ф., Чижов И.В., Зайков В.А.Konstantinov S.V., Komarov F.F., Chizhov I.V., Zaikov V.A.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://doklady.belnauka.by/jour/article/view/1117

Покрытия TiAlCuN были сформированы методом реактивного магнетронного распыления на подложках титана марки ВТ1-0 и монокристаллического кремния. Для контроля и управления процессом нанесения покрытий методом реактивного магнетронного распыления использовался разработанный модульный комплекс управления расходом газов. Исследован элементный состав покрытий методом рентгеноспектрального микроанализа. Изучено структурно-фазовое состояние покрытий методами рентгеновской дифракции и сканирующей электронной микроскопии. Механические свойства, такие как твердость и модуль Юнга, исследованы по методике Оливера и Фарра с использованием нанотвердомера CSM Instruments Nanohardness Tester NHT2 (Швейцария). Рассмотрено влияние параметров осаждения, таких как: содержание Ti и Al, степень реактивности α и концентрация азота на структуру и механические свойства. Установлено, что снижение степени реактивности α с 0,605 до 0,474 приводит к увеличению скорости осаждения покрытия TiAlCuN на 23 %. Обнаружено, что добавление меди в состав приводит к уменьшению среднего размера кристаллитов и колонок роста по сравнению с TiAlN аналогами за счет ее сегрегации по границам раздела фаз, что улучшает механические свойства покрытий. Твердость покрытий TiAlСuN варьируется в диапазоне H = 29,3–35,4 ГПа, модуль Юнга – E = 235,9–267,6 ГПа. Рассчитаны показатели ударной вязкости H / E* и сопротивления пластической деформации H3 / E*2. Сформированные нитридные покрытия пригодны для использования в космической технике. 

TiAlCuN coatings were deposited by reactive magnetron sputtering on substrates of single-crystal silicon, and Titanium Grade2 wafers. To control and manage the coating deposition process by reactive magnetron sputtering, a previously developed modular gas flow control complex (MGFCC) was used. The elemental composition was studied by energy-dispersive X-ray spectroscopy (EDX). The structural-phase state of coatings was examined by X-ray diffraction (XRD) and scanning electron microscopy (SEM). Mechanical properties, such as hardness and Young’s modulus, were investigated by the nanoindentation using a CSM Instruments Nanohardness Tester NHT2 (Switzerland). The influence of deposition parameters such as: Ti and Al content, reactivity degree α, and nitride concentration on structure and mechanical properties was considered. It was found that a decrease in the reactivity degree α from 0.605 to 0.474 leads to a 23 % increase in the deposition rate of TiAlCuN coating. It was detected that adding Cu to the coating content decreases the mean sizes of crystallites and growth columns in comparison with the TiAlN analogues due to its segregation along crystalline boundaries and thus advances better mechanical characteristics. The hardness of TiAlCuN coatings varies in the range of H = 29.3–35.4 GPa, Young’s modulus E = 235.9–267.6 GPa. The impact strength index as the H / E∗ ratio and the plastic deformation resistance index H3 / E∗2 were calculated. The formed nitride coatings are suitable for use in space technologies.

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The authors declare that there are no conflicts of interest present.