danДоклады Национальной академии наук БеларусиDoklady of the National Academy of Sciences of Belarus1561-83232524-2431The Republican Unitary Enterprise Publishing House "Belaruskaya Navuka"10.29235/1561-8323-2021-65-4-412-421dan-988Research ArticleФИЗИКАPHYSICSРадиационная стойкость наноструктурированных покрытий TiCrNRadiation tolerance of nanostructured TiCrN coatingsКонстантиновС. В.KonstantinovS. V.

Константинов Станислав Валерьевич – канд. физ.- мат. наук, ст. науч. сотрудник

ул. Курчатова, 7, 220045, Минск

Konstantinov Stanislav V. – Ph. D. (Physics and Mathematics), Senior researcher

7, Kurchatov Str., 220045, Minsk 

mymail3000@tut.byКомаровФ. Ф.KomarovF. F.

Комаров Фадей Фадеевич – член-кореспондент, д-р физ.-мат. наук, профессор, заведующий лабораторией

ул. Курчатова, 7, 220045, Минск

Komarov Fadey F. – Corresponding Member, D. Sc. (Physics and Mathematics), Professor, Head of the Laboratory

7, Kurchatov Str., 220045, Minsk 

komarovf@bsu.byСтрельницкийВ. Е.Strel’nitskijV. E.

Стрельницкий Владимир Евгеньевич – д-р физ.-мат. наук, ст. науч. сотрудник, начальник лаборатории

ул. Академическая, 1, 61108, Харьков 

Strel’nitskij Vladimir E. – D. Sc. (Physics and Mathematics), Senior researcher, Head of the Laboratory

1, Akademicheskaya Str., 61108, Kharkov 

strelnitskij@kipt.kharkov.uaИнститут прикладных физических проблем имени А. Н. Севченко Белорусского государственного университетаA. N. Sevchenko Institute of Applied Physical Problems of the Belarusian State UniversityНациональный научный центр «Харьковский физико-технический институт»National Science Center Kharkov Institute of Physics and Technology202101092021654412421Copyright © Константинов С.В., Комаров Ф.Ф., Стрельницкий В.Е., 20212021Константинов С.В., Комаров Ф.Ф., Стрельницкий В.Е.Konstantinov S.V., Komarov F.F., Strel’nitskij V.E.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://doklady.belnauka.by/jour/article/view/988

Методом сепарируемого вакуумно-дугового осаждения сформированы наноструктурированные покрытия TixCr1–xN различных составов 0,58 ≤ x ≤ 0,8 на подложках из нержавеющей стали 12Х17 и монокристаллического кремния. Изучен элементный состав методом спектрометрии резерфордовского обратного рассеяния ионов гелия, структурно-фазовое состояние и морфология методами рентгеновской дифракции, оптической и сканирующей электронной микроскопии, проведены трибомеханические испытания исходных покрытий. Проведено исследование радиационной стойкости наноструктурированных покрытий TixCr1–xN 0,58 ≤ x ≤ 0,8 при облучении ионами He+ с энергией 500 кэВ в диапазоне флюенсов 5·1016–3·1017 ион/см2. Установлено, что покрытия TixCr1–xN 0,58 ≤ x ≤ 0,8 выдерживают облучение без существенных изменений структуры до флюенса 2·1017 ион/см2, при котором начинается частичный флекинг (отшелушивание) покрытий до глубины среднего проективного пробега ионов гелия. Обнаружено уменьшение среднего размера кристаллитов покрытий и уменьшение периода кристаллической решетки покрытий после облучения. Установлено уменьшение микротвердости покрытий TixCr1–xN всех составов после облучения.

Nanostructured TixCr1–xN coatings of various compositions 0.58 ≤ x ≤ 0.8 on the substrates made of AISI 304 stainless steel and monocrystalline silicon were formed by the method of separable vacuum-arc deposition. The elemental composition was studied by Rutherford backscattering spectrometry of helium ions. The structural-phase state and the morphology were examined by X-ray diffraction, optical and scanning electron microscopy, tribomechanical tests of the initial coatings were also carried out. The radiation tolerance of the nanostructured TixCr1–xN coatings within 0.58 ≤ x ≤ 0.8 under He+ ion irradiation with an energy of 500 keV in the fluence range of 5·1016–3·1017 ions/cm2 was studied for the first time. It was found that the TixCr1–xN coatings within 0.58 ≤ x ≤ 0.8 withstand irradiation without significant changes in the structure up to a fluence of 2·1017 ions/cm2, when a partial coating flaking (exfoliation) up to a depth of the projected range of helium ions takes place. A decrease in the average size of crystallites of coatings and the crystal lattice period reduction after radiation exposure were detected. The decrease in the microhardness of the TixCr1–xN coatings of all compositions after irradiation was found.

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The authors declare that there are no conflicts of interest present.