INFLUENCE OF SUBSTRATE HEATING AND BIAS POTENTIAL ON THE Ti Al C N COATINGS OPTICAL CHARACTERISTICS
https://doi.org/10.29235/1561-8323-2018-62-4-415-422
Abstract
Ti–Al–C–N coatings were produced by reactive magnetron deposition at different substrate temperatures Ts (220, 340 and 440 °C) and bias voltages Ubias (–90, –150 and –200 V). Using the energy dispersive X-ray spectroscopy method, it was found that the increase of the bias voltage led to a growth of argon atomic concentration and the (Al + Ti) / (Ti + N) ratio and to a decrease of the trace oxygen concentration in Ti–Al–C–N coatings. The growth of Ts promoted a decrease in the oxygen concentration. By means of scanning electron microscopy, a change in the type of the microstructure (columnar, granular and mixed columnar-granular) of coatings by varying Ts and Ubias was found. Electrophysical measurements showed the change of the film resistivity (1982–3169 μΩ · cm) when the deposition conditions were varied. The solar absorptance αs was varied from 0.24 to 0.54, the emittance ε was varied from 0.33 to 0.52, and the αs / ε ratio was varied from 0.60 to 1.44 by changing Ts and Ubias. The obtained results indicate the opportunity to vary the Ti–Al–C–N films electrophysical and optical characteristics by choosing optimal substrate heating temperature and bias voltage.
About the Authors
Iryna M. Klimovich
Belarusian State University
Belarus
Belarus
Klimovich Iryna Mikhailovna – Postgraduate student
4, Nezavisimosti Ave., 220030, Minsk
Fadei F. Komarov
A. N. Sevchenko Institute of Applied Physics Problems of the Belarusian State University
Belarus
Belarus
Komarov Fadei Fadeevich – Corresponding Member, D. Sc. (Physics and Mathematics), Professor, Head of the Laboratory
7, Kurchatov Str., 220045, Minsk
Valery A. Zaikov
Belarusian State University
Belarus
Belarus
Zaikov Valery Aleksandrovich – Senior Lecturer
4, Nezavisimosti Ave., 220030, Minsk
References
1. Baturkin V. Micro-satellites thermal control-concepts and components. Acta Astronautica, 2005, vol. 56, no. 1–2, pp. 161–170. https://doi.org/10.1016/j.actaastro.2004.09.003
2. Brogren M., Harding G. L., Karmhag R., Ribbing C. G., Niklasson G. A., Stenmark L., Titanium–aluminum–nitride coatings for satellite temperature control. Thin Solid Films, 2000, vol. 370, no. 1–2, pp. 268–277. https://doi.org/10.1016/ s0040-6090(00)00914-7
3. Chen J. T., Wang J., Zhang F., Zhang G. A., Fan X. Y., Wu Z. G., Yan P. X. Characterization and temperature controlling property of TiAlN coatings deposited by reactive magnetron co-sputtering. Journal of Alloys and Compounds, 2009, vol. 472, no. 1–2, pp. 91–96. https://doi.org/10.1016/j.jallcom.2008.04.083
4. Selvakumar N., Barshilia H. C. Review of physical vapor deposited (PVD) spectrally selective coatings for mid- and high-temperature solar thermal applications. Solar Energy Materials and Solar Cells, 2012, vol. 98, pp. 1–23. https://doi. org/10.1016/j.solmat.2011.10.028
5. Brogren M., Harding G. L., Karmhag R., Niklasson G. A., Ribbing C.-G., Stenmark L. TixAlyN coatings for temperature control of spacecraft. EUROPTO Conference on Advances in Optical Interference Coatings, 1999, vol. 3738, pp. 493– 501. https://doi.org/10.1117/12.360120
6. Klimovich I. M., Kuleshov V. N., Zaikov V. A., Burmakov A. P., Komarov F. F., Ludchik O. R. Gas flow control system in reactive magnetron sputtering technology. Pribory i metody izmerenii = Devices and methods of measurements, 2015, vol. 6, no. 2, pp. 139–147 (in Russian).
7. Burmakov A. P., Kuleshov V. N., Stolyarov A. V. Gas flow control system for magnetron film deposition technologies. Mezhdunarodnyi kongress po informatike: Informatsionnye sistemy i tekhnologii [International Congress on Computer Science: Information Systems and Technologies]. Minsk, Belarusian State University, 2016, pp. 771–776 (in Russian).
8. Eriksson T. S., Granqvist C. G. Infrared optical properties of silicon oxynitride films: Experimental data and theoretical interpretation. Journal of Applied Physics, 1986, vol. 60, no. 6, P. 2081–2091. https://doi.org/10.1063/1.337212
9. Veszelei M., Veszelei E. Optical properties and equilibrium temperatures of titanium-nitride-and graphite-coated Langmuir probes for space application. Thin Solid Films, 1993, vol. 236, no. 1–2, pp. 46–50. https://doi.org/10.1016/0040- 6090(93)90640-b
10. Riedl H., Koller C. M., Munnik F., Hutter H., Mendez M. F., Rachbauer R., Kolozsvári S., Bartosik M., Mayrhofer P. H. Influence of oxygen impurities on growth morphology, structure and mechanical properties of Ti–Al–N thin films. Thin Solid Films, 2016, vol. 603, pp. 39–49. https://doi.org/10.1016/j.tsf.2016.01.039
11. Ustel F., Mayrhofer P. H., Mitterer C. The Influence of the Ion Bombardment Conditions on the Oxidation Behavior of Sputtered TiN Coatings. Praktische Metallographie = Practical Metallography, 2002, vol. 39, no. 11, pp. 587–598.
12. Petrov I., Barna P. B., Hultman L., Greene J. E. Microstructural evolution during film growth. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2003, vol. 21, no. 5, pp. S117–S128. https://doi.org/10.1116/1.1601610
13. Wahlström U., Hultman L., Sundgren J.-E., Adibi F., Petrov I., Greene J. E. Crystal growth and microstructure of polycrystalline Ti1−xAlxN alloy films deposited by ultra-high-vacuum dual-target magnetron sputtering. Thin Solid Films, 1993, vol. 235, no. 1–2, pp. 62–70. https://doi.org/10.1016/0040-6090(93)90244-j
14. Jalali R., Parhizkar M., Bidadi H., Naghshara H., Hosseini S. R., Jafari M. Effect of Al content, substrate temperature and nitrogen flow on the reactive magnetron co-sputtered nanostructure in TiAlN thin films intended for use as barrier material in DRAMs. Journal of the Korean Physical Society, 2015, vol. 66, no. 6, pp. 978–983. https://doi.org/10.3938/jkps.66.978
15. Lee S.-Y., Wang S.-C., Chen J.-S., Huang J.-L. Effects of deposition and post-annealing conditions on electrical properties and thermal stability of TiAlN films by ion beam sputter deposition. Thin Solid Films, 2006, vol. 515, no. 3, pp. 1069– 1073. https://doi.org/10.1016/j.tsf.2006.07.172
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