Processes of formation of Cu–Ni alloy films by electron beam evaporation
https://doi.org/10.29235/1561-8323-2023-67-2-156-162
Abstract
The features of the formation of Cu–Ni alloy films by electron beam evaporation are considered. The position of the isobars of the total pressure of copper and nickel on the state diagram of the Cu–Ni during evaporation in vacuum is determined. Calculations of the elemental compositions of films have been carried out. It is shown that the nickel content in films deposited during boiling of Cu50Ni50 alloy in vacuum is 50 times less than in the alloy. The structure and elemental composition of the surface layer of alloys after their evaporation and sublimation, as well as the elemental composition of the deposited films, are investigated. It is shown that the most acceptable way to obtain films of stable composition in the Cu–Ni system is simultaneous electron beam evaporation of copper and nickel from two crucibles.
About the Authors
S. A. Chizhik
Belarusian National Technical University
Belarus
Belarus
Chizhik Sergey A. – Academician, D. Sc. (Engineering),
Professor, Head of the Department
22, Yakub Kolas Str., 220013, Minsk
V. A. Zelenin
Physical-Technical Institute of the National Academy of Sciences of Belarus
Belarus
Belarus
Zelenin Victor A. – D. Sc. (Engineering), Professor, Chief
Researcher
10, Kuprevich Str., 220084, Minsk
Yu. A. Yahorava
Физико-технический институт Национальной академии наук Беларуси
Belarus
Belarus
Yahorava Yuliya А. – Researcher
References
1. Zelenin V. A. Silicide alloys of azeotropic and eutectic compositions for cathodes and targets of vacuum arc and magnetron installations. Sovremennye metody i tehnologii sozdanija i obrabotki materialov: sbornik nauchnyh trudov: v 2 knigah. Kniga 1: Novye tehnologii i materialy [Modern methods and technologies for creating and processing materials: a collection of scientific papers, in 2 books. Book 1: New technologies and materials]. Minsk, 2021, pp. 208–223 (in Russian).
2. Volochko A. T., Zelenin V. A., Narushko E. O. Multilayer coatings on computer elements as a means of technical protection of information. Problemy informacionnoj bezopasnosti [Information security issues]. Simferopol, 2016, pp. 16–19 (in Russian).
3. Lyakishev N. P. (ed.). State diagrams of binary metal systems. Handbook. Vol. 2. Moscow, 1997, pp. 275–284 (in Russian).
4. Palatnik L. S., Levchenko A. A., Bogdanova A. F., Terletskii V. E. Determination of the type of Cu–Ni equilibrium diagram in the high temperature region by spectral analysis. Fizika metallov i metallovedenie = Physics of Metals and Metallography, 1958, vol. 6, no. 3, pp. 540–544 (in Russian).
5. Gieng R. Vacuum Evaporation. Maissel L., Glang R. (eds.). Handbook of Thin Film Technology. McGraw-Hill, 1970, pp. 1–123.
6. Nesmeyanov A. N. Vapor pressure of chemical elements. Moscow, 1961. 397 p. (in Russian).
7. Lakhtin Yu. M. Materials science and heat treatment of metals. Moscow, 1983. 359 p. (in Russian).
8. Volochko A. T., Zelenin V. A., Markov G. V., Narushko E. O. Influence of formation modes on the structure of thin coatings used in multilayer EMR screens. Sovremennye metody i tehnologii sozdanija i obrabotki materialov: sbornik nauchnyh trudov [Modern methods and technologies for the creation and processing of materials: a collection of scientific papers]. Minsk, 2019, pp. 60–66 (in Russian).
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