Production of silicon carbide nanoparticles by spray pyrolysis from femtoliter droplets of chlorotrimethylsilane
https://doi.org/10.29235/1561-8323-2020-64-1-111-115
Abstract
For the first time, silicon carbide nanoparticles were obtained by spray pyrolysis of chlorotrimethylsilane droplets in an aerosol reactor with argon flow. It was shown that with an increase in the reactor wall temperature to 1100 °C, the sample purity degree grows, and the average size of the nanoparticles is 6-40 nm.
About the Authors
V. I. SaverchenkoRussian Federation
Saverchenko Viktor I. - Ph. D. (Physics and Mathematics), Researcher.
15, P. Brovka Str., 220072, Minsk
Y. A. Khodyko
Russian Federation
Khodyko Yuliya A. - Ph. D. (Physics and Mathematics), Chief researcher.
15, P. Brovka Str., 220072, Minsk
N. N. Cherenda
Russian Federation
Cherenda Nicolay N. - Ph. D. (Physics and Mathematics), Associate professor.
4, Ne-zavisimosti Ave., 220030, MinskReferences
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