Structural and optical properties of Zn-implanted silica: effect of fluence and annealing
https://doi.org/10.29235/1561-8323-2020-64-3-273-281
Abstract
The phase-structural composition of a silica film grown on Si substrate implanted with Zn ions at room temperature with different fluences has been studied using transmission electron microscopy and electron diffraction. The small clusters (1–2 nm) and the large clusters (5–7 nm) have been formed in as-implanted silica films with the Zn concentration of 6–7 at % and 16–18 at %, respectively. Furnace annealing at 750 °С for two hours results both in the formation of the orthorhombic Zn2SiO4 phase (space group R-3) in the case of low fluence (5 · 1016 cm–2) and in the formation of the cubic ZnO phase (space group F-43m) in the case of high fluence (1 · 1017 cm–2). It has been shown that impurity loss during implantation and subsequent annealing increase with fluence of implanted ions. The fraction of Zn atoms in clusters has been estimated to be 15 % and 18 % for fluences (5 · 1016 cm–2) and (1 · 1017 cm–2), respectively. It has been shown that residual Zn impurities dissolved in silica matrix noticeably suppress the light-emitting properties of silica with embedded Zn2SiO4 and ZnO nanocrystals.
About the Authors
M. A. Makhavikou
A. N. Sevchenko Institute of Applied Physical Problems of the Belarusian State University
Belarus
Belarus
Makhavikou Maxim A. – Researcher
7, kurchatov Str., 220108, Minsk
O. V. Milchanin
A. N. Sevchenko Institute of Applied Physical Problems of the Belarusian State University
Belarus
Belarus
Milchanin Oleg V. – Senior researcher
7, kurchatov Str., 220108, Minsk
I. N. Parkhomenko
Belarusian State University
Belarus
Belarus
Parkhomenko Irina N. – Ph. D. (Physics and Mathematics), Senior researcher
5, kurchatov Str., 220108, Minsk
F. F. Komarov
A. N. Sevchenko Institute of Applied Physical Problems of the Belarusian State University
Belarus
Belarus
Komarov Fadei F. – Corresponding Member, D. Sc. (Physics and Mathematics), Head of the Laboratory
7, kurchatov Str., 220108, Minsk
L. A. Vlasukova
Belarusian State University
Belarus
Belarus
Vlasukova Liudmila A. – Ph. D. (Physics and Mathematics), Head of the Laboratory
5, kurchatov Str., 220108, Minsk
D. S. Korolev
Lobachevsky State University of Nizhny Novgorod
Russian Federation
Russian Federation
Korolev Dmitriy S. – Ph. D. (Physics and Mathematics), Researcher
23, Gagarin Ave., 603950, Nizhny Novgorod
A. V. Mudryi
Scientific and Practical Materials Research Center of the National Academy of Sciences of Belarus
Belarus
Belarus
Mudryi Alexander V. – Ph. D. (Physics and Mathematics), Chief researcher
19, P. Brovka Str., 220072, Minsk
V. D. Zhivulko
Scientific and Practical Materials Research Center of the National Academy of Sciences of Belarus
Belarus
Belarus
Zhivulko Vadim D. – Ph. D. (Physics and Mathematics), Senior researcher
19, P. Brovka Str., 220072, Minsk
Vuuren A. Janse van
Centre for High Resolution Transmission Electron Microscopy, Nelson Mandela Metropolitan University
South Africa
South Africa
Arno Janse van Vuuren – Ph. D., Researcher
building 124, 6001, Port Elizabeth
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